VIII Inch Halfmoon Pars LPE Reactor Factory

Tantalum Carbide Coated Planetarium gyrationis Orbis Manufacturer

SiC Coated Ferocactus Susceptor pro LPE PE2061S Supplier

Tantalum Carbide Coating

VeTek semiconductor est primarius fabricae Tantali Carbide Coating materias semiconductoris industriae. Nostrae oblationes principales productae includunt partes CVD tantalum carbidam coating partes, sintedi TaC partes efficiens pro cristallo augmenti SiC vel epitaxiae semiconductoris. Transierunt ISO9001, VeTek Semiconductor bonam potestatem in qualitate habet. VeTek Semiconductor dicatus est ut innovator factus sit in Tantalum Carbide Coating industriam per permanentem inquisitionem et progressionem technologiarum iterativarum.

Summa producta sunt Tantalum Carbide efficiens defectorem anulum, TaC obductis anulum distringere, partes dimidiatas TaC obductas, Tantalum Carbide rotationis Orbis Planetariae Coated (Aixtron G10), TaC Crucible Coated; TaC Coated Annulos; TaC Coated Porous Graphite; Tantalum Carbide Coating Graphite Susceptor; TaC Coated Guide Ring; TaC Tantalum Carbide Coated Plate; TaC Coated Wafer Susceptor; TaC Coating Ring; TaC Coating Graphite Cover; TaC Coated Chunk etc., puritas est infra 5ppm, videre elit requisita.

TaC graphite coating creatum est superficies graphitae altae puritatis substratae cum strato subtilissimo carbidi tantali per Depositionis Vaporis chemici proprietatis (CVD) processum. Commodum infra picturam ostenditur:

Tantalum carbide (TaC) efficiens attentionem consecuta est ob altitudinem eius liquescentis punctum usque ad 3880°C, excellentem roboris mechanicam, duritiem et resistentiam ad pulsuum thermarum, idque amabili modo ad compositiones semiconductoris epitaxy processuum cum temperatura superiori requisitis; ut Aixtron MOCVD systema et LPE SiC processum epitaxy. Etiam late patet in PVT methodo SiC processum cristallinum.

Parameter VeTek Semiconductor Tantalum Carbide Coating:

Corporalis proprietatibus TaC coating
Density	14.3 (g/cm³)
Imprimis emissivity	0.3
Scelerisque expansion coefficientes	6.3 10-6/K
Duritia (HK)	2000 HK
Resistentia	1×10-5 Ohm*cm
Scelerisque status	<2500℃
Graphite magnitudine mutationes	-10~-20um
Crassitudo coating	≥20um valorem typicum (35um±10um)

TaC coating EDX data

TaC efficiens crystal structuram data

Elementum	Cento atomicus
	Pt. 1	Pt. 2	Pt. 3	Mediocris
C K	52.10	57.41	52.37	53.96
Ta M	47.90	42.59	47.63	46.04

TaC Coating Chuck TaC Coating Planetary Orbis TaC Coated Plate TaC Coating Rotatione Plate TaC coating susceptor CVD TaC coating Cover CVD TaC Coating Ringo TaC Coating Plate

Pii Carbide Coating

VeTek Semiconductor speciale in productione ultra purum Siliconis Carbide productorum Coating, hae tunicae ad graphites, ceramicos et metalla refractoria applicanda destinantur.

Nostrae puritatis altae coatinges praesertim in usu in semiconductoribus et in industriis electronicis iaculis sunt. Pro tutelae laganum baiulum, susceptores et elementa calefacientia inserviunt, ea custodiendo a ambitus mordax et reactiva, quae in processibus occurrunt, ut MOCVD et EPI. Hi processus integrales sunt processus lagani et fabrica fabricandi. Accedit, nostrae membranae aptae sunt applicationibus in fornacibus vacuo et calefactione exempli, ubi summus vacuum, reactivum et oxygenii ambitus offendit.

In VeTek Semiconductor, solutionem comprehensivam offerimus cum facultatibus machinarum machinarum provectorum. Hoc efficit ut basium componentium utentes graphite, ceramico, vel refractariis metallis fabricare, ac ceramicam SiC vel TaC coatings in aedibus adhibere possimus. Etiam operas efficiens praebemus ad partes suppeditatas, ut flexibilitas ad diversas necessitates occurrat.

Nostri Silicon Carbide Productorum Coating late usi sunt in epitaxy Si, epitaxy SiC, systema MOCVD, RTP/RTA processus, processus engraving, processus ICP/PSS engraving, processus variarum LED generum, inter caeruleum et viridem LED, UV LED et profunde UV DUXERIT etc., quod aptatur instrumentis ex LPE, Aixtron, Veeco, Nuflare, TEL, ASM, Annealsys, TSI et sic porro.

Reactor partes facere possumus;

Pii Carbide Coing multa singularia commoda:

VeTek Semiconductor Silicon Carbide Coating Parameter:

Basicae physicae proprietates CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β Phase polycrystallina, maxime (111) ordinatur
Density	3.21 g/cm³
duritia	MMD Vickers duritiem 500g onus
Frumenti amplitudo	2~10μm
Puritas chemica	99.99995%
Calor Capacity	640 J·kg-1·K-1
Sublimatio Temperature	2700℃
Flexurae Fortitudo	415 MPa RT 4-punctum
Modulus	430 Gpa 4pt bend, 1300℃
Scelerisque conductivity	300W·m-1·K-1
Scelerisque Expansion (CTE)	4.5×10-6K-1

producti insigniti

De nobis

VeTek semiconductor Technologiae Co., LTD, anno 2016 condita, est primarius provisor materiae efficiens pro semiconductoris industriae. Fundator noster, olim peritus ex Academia Scientiarum Instituti Materiarum Sinensium, societatem constituit cum umbilico ad solutiones incisionis ad industriam explicandas.

Nostrum principalis productum oblationes includitCVD pii carbide (SiC) coatings, tantalum carbide (TaC) coatings, mole SiC, SiC pulveris, et materiae puritatis altae SiC. Producta principalia sunt SiC obductis graphite susceptor, anulos preheat, annulum distringere TaC obductis, partes dimidiae lunae, etc., puritas infra 5ppm est, ut mos requisita occurrere potest.

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