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Silicon Carbide obductis Epi susceptor
  • Silicon Carbide obductis Epi susceptorSilicon Carbide obductis Epi susceptor

Silicon Carbide obductis Epi susceptor

VeTek Semiconductor primarius est opificem et supplementum productorum SiC coatingarum in Sinis. VeTek Semiconductoris SiC obductis Epi susceptor industriam summam qualitatem habet, pluribus generibus incrementi fornacis epitaxialis apta est, et operas productos valde nativus praebet. VeTek Semiconductor prospicit ad longum tempus socium tuum in Sinis fieri.

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Epitaxia semiconductor ad incrementum tenuis cinematographici cum certis cancellis structurae in superficie materiae subiectae per modos ut gas phase, liquidum tempus vel trabem hypotheticam depositio, ita ut stratum cinematographicum tenue nuper creverit (stratum epitaxiale) habet. eadem vel similis cancelli structurae et propensionis substratae. 


technologia epitaxia pendet in fabricandis semiconductoribus, praesertim in praeparatione membranae qualis optimae tenuis, sicut singulae stratae crystallinae, heterostructurae et quantum structurae adhibitae ad altas faciendos machinas fabricandas.


The Epi susceptor key component usus est ut substrata in apparatu incrementi epitaxial sustineat et in epitaxia Siliconis late adhibetur. Qualitas et effectus basi epitaxialis directe afficiunt incrementum qualitatem epitaxialis stratis et partes vitalis agunt in finali machinis semiconductoris effectus.


VeTek Semiconductoriacuit SIC in superficie SGL graphite per methodum CVD coatingit, et epi susceptorem SiC coatingit cum proprietatibus ut resistentia caliditas, resistentia oxidationis, resistentiae corrosionis et uniformitatis scelerisque adeptus est.

Semiconductor Barrel Reactor


In dolio typico reactor, SiC obducta Epi susceptor dolium structuram habet. Fundum SiC bituminatum Epi susceptore rotali stipite iungitur. Per processum incrementi epitaxialis, alternis horologicis et counterclockwise rotationem conservat. Gas reactionis cameram per colliculum reactionem intrat, ita ut gas fluxus satis uniformem distributionem in camera reactionis format, ac tandem incrementum epitaxiale uniforme efformet.


The relationship between the mass change of SiC coated graphite and the oxidation time

Necessitudo inter massam mutationem graphite SiC obductis et temporis oxidationis


Eventus studiorum editorum monstrant 1400℃ et 1600℃, massa graphite SiC obductis minime augeri. Hoc est, SiC graphite obductis facultatem antioxidant validam habet. Ergo, SiC obductis Epi susceptor diu in fornacibus maxime epitaxial laborare potest. Si plus requisita aut necessitates nativus habes, pete nobis. optimae qualitati SiC solutiones susceptorum susceptorum Nos committimus providendo SiC.


Basicae physicae proprietates CVD SiC coating


Basicae physicae proprietates CVD SiC coating
Property
Typical Value
Crystal Structure
FCC β Phase polycrystallina, maxime (111) ordinatur
Sic coating densitas 3.21 g/cm³
duritia
MMD Vickers duritiem 500g onus
Frumenti amplitudo
2~10μm
Puritas chemica
99.99995%
Calor Capacitas
640 J·kg-1·K-1
Sublimatio Temperature
2700℃
Flexurae Fortitudo
415 MPa RT 4-punctum
Modulus
430 Gpa 4pt bend, 1300℃
Scelerisque Conductivity
300W·m-1·K-1
Scelerisque Expansion (CTE)
4.5×10-6K-1

VeTek SemiconductorPii Carbide obductis Epi susceptor shops


Graphite epitaxial substrateSemiconductor EquipmentGraphite ring assemblySemiconductor process equipment


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